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UV KUB 9
Blue tapes UV exposure
The substrate holder can receive 4, 6 and 8 inches diameter wafers and dicing mainframes of 7 and 9 inches for "blue tapes" UV exposure.
The total exposure time for the inhition of "blue tapes" at full power is around 20 seconds.
INSOLATOR HIGH-POWER DENSITY: UV-KUB 9
UV high powered system for large surface exposure
The large surface exposure system UV-KUB 9 is a cold-UV exposure system based on LED technology emitting a high power density, homogeneous and monochromatic illumination (200mW/cm² +/- 5%) at 365nm over a working surface of 9 inches.
It is the ideal equipment for applications like wafer bonding, temporary bonding and blue tape exposure used for dicing microelectronic wafers, especially issued from grinding technologies.
Related applications
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Photonics |
Microelectronics |
Surface functionalization |
Performances
- Wavelength: 365nm +/- 5nm
- Power density: 200mW/cm² +/- 5%
- Substrate warm-up during exposure: < 2°C
- Exposure cycle: between 1s and 1h
- Number of programmable cycles: 10
Specifications
- Dimensions: 350 x 410 x 355mm
- Weight: 22kg / 48lbs
- Colour touchscreen: 5,7 inches
- Power supply: 100V/240V - 50Hz/60Hz
- Consumption: 800W
- Exposure time blue tapes: ADWILL D650 - 15s
- Exposure time blue tapes: ADWILL D175 P370 - 45s