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UV KUB 3
Resolution and alignment precision
A compact mask alignment system
Beyond its size reduced to a minimum, its internal supporting structure dispenses the need for anti-vibration table, combined with low power consumption, the UV-KUB 3 is the ideal tool to control the operating costs.
With the UV-KUB 3 make precision mask alignments of less than 1 µm in few minutes with the ergonomic control joypad or with the help of the dynamic and intuitive tactile interface.
NEW GENERATION OF MASK ALIGNER: UV-KUB 3
First compact system with UV-LED source
The mask aligner UV-KUB 3 is the first mask alignment system equipped with a UV-LED source, that provide an unrivalled collimation and homogeneous exposure, on the international market.
Compact, easy to use and efficient, the UV-KUB 3 allows alignment up to 7" photolithography mask with substrates up to 6" in a cube volume of 48cm size.
Compatible with all standard photoresists: AZ, Shipley, SU8 and K-CL
Related applications
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Microfluidics |
Microelectronics |
Microelectronics |
Surface functionalization |
| Performances | |
| Resolution: | 1µm |
| Alignment accuracy: 1µm | 1µm |
| Accepted masks size: | up to Ø 5" or Ø 7" respectively with 4'' and 6'' version |
| Accepted substrate size: | Ø 2" - Ø 4" - Ø 6" and 50 x 50mm - 100 x 100mm |
| Visualization system resolution: | 1,5µm |
| Mask/substrate measuring distance resolution: | 0,5µm |
| θ substrate displacement resolution: | 5.10-4° |
| XYZ substrate displacement resolution: | 0,4µm |
| Wavelength: | 365nm +/- 5nm |
| Power density: | 35mW/cm² +/- 10% |
| Substrate warm-up during exposure: | < 1°C |
| Exposure cycle: | between 1s and 1h |
| Number of programmable cycles: | > 100 |
| Specifications | |
| Dimensions: | 475 x 480 x 515mm |
| Weight: | 55kg / 121lbs |
| Displacement control: | USB or wireless 24 key PAD |
| Colour touchscreen: | 15.6 inches |
| Power supply: | 100V/240V - 50Hz/60Hz |
| Consumption: | 180W |