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UV KUB 2
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High quality collimation system
The UV-LED masker UV-KUB 2 benefits from a high quality collimation system that enables to obtain a homogeneous high resolution over the 4 or 6 inches working surface, depending the version.
The divergence angle of the UV light source is less than 2°.
Therefore the achievement of patterns with resolution down to 1µm and with excellent verticality of edges on thick layers is guaranteed.
UV-LED MASKING SYSTEM: UV-KUB 2
An UV-LED masker with an unrivalled collimation perfomance
The exposure and masking system UV-KUB 2, available in 4" or 6" version, is the first UV-LED masking system available on the international market. The UV-KUB 2 is a compact exposure-masking system equipped with a LED based optical head, collimated and homogeneous.
Its masking function enables to reach resolutions down to 1µm. This system is compatible with any of the most popular photoresists such as AZ series, Shipley series, SU-8 and K-CL series.
Related applications
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Microfluidics |
Microelectronics |
Microelectronics |
Surface functionalization |
| Performances | |
| Resolution: | 1µm |
| Wavelength: | 365nm +/- 5nm |
| Power density: | 35mW/cm² +/- 10% |
| Substrate warm-up during exposure: | < 1°C |
| Exposure cycle: | between 1s and 1h |
| Number of programmable cycles: | 10 |
| Specifications | |
| Dimensions: | 260 x 260 x 260mm |
| Weight: | 8,2kg / 18lbs |
| Colour touchscreen: | 5,7 inches |
| Power supply: | 100V/240V - 50Hz/60Hz |
| Consumption: | 180W |